A reflecting mirror facet (RMF) photodiode suitable for surface-mountable optical package

The Reflecting mirror facet (RMF) photodiodes with two V-grooves and a conventional back-illuminated vertical absorption structure were made for surface mounting and edge illumination applications. The two adjacent V-grooves convert a horizontal beam to nearly a vertical beam. Even with the edge-illuminated structure, RMFPDs showed the high reliability from the buried p-n junction.