Packaging technology for wavelength tunable filter based on optical MEMS

One of the key components for the WDM optical communication is a wavelength tunable filter. The packaging technology of the tunable filter with Fabry-Perot cavity based on optical MEMS is investigated for the low power consumption and mass production. The flip chip process with Au-20(wt.%)Sn solder was conducted to integrate two DBR mirrors in parallel with a constant distance for the simple design of packaging structure. TEC fiber was used to achieve a wide range of the optical alignment tolerance for the high coupling efficiency.