A two-axis electrothermal SCS micromirror for biomedical imaging

This paper reports a 1 mm/sup 2/, two-axis, single-crystalline-silicon (SCS)-based aluminum-coated micromirror with large scanning angle (up to 40/spl deg/), which can be used for biomedical imaging. The micromirror is fabricated by a deep-reactive-ion-etch post-CMOS micromachining process.