Electron-beam-induced deposition of conductive nanostructures with carbon nanotube emitters

Electron-beam-induced deposition (EBID) with two kinds of organometallic compounds including tungsten hexacarbonyle (W(CO)/sub 6/) and dimethyl-gold ((CH/sub 3/)/sub 2/(C/sub 5/H/sub 7/O/sub 2/)Au) as precursors is presented so as to obtain conductive nanostructures. Their resistivity and growth rate are measured, and the composition of deposits are analyzed. To improve the resolution of the deposit and energy consumption, EBID with multiwalled carbon nanotubes (MWNTs) as emitters is demonstrated. In the deposit at anode by using W(CO)/sub 6/, mass of the tungsten reaches up to 80% among the compositions.