Architecture of a three-probe MEMS nanomanipulator with nanoscale end-effectors

We report the development of a three-probe manipulator for handling and characterizing the properties of nanoscopic objects. The manipulator is realized using micromachining and nanofabrication techniques. It is powered using thermal bimetallic actuation principle. We developed nanoscale end-effectors to directly interface with nanoscopic objects. The end-effectors are mode using focused ion beam milling.