RF MEMS switch for wireless LAN applications

Double cantilever beam MEMS switch was developed for wireless LAN applications. The two beams are controlled by a single actuation electrode. The dimension of the fabricated cantilever beam is 150 /spl mu/m /spl times/ 60 /spl mu/m /spl times/ 0.6 /spl mu/m. The spacing between the top beam and the bottom ground electrode was approximately 1 /spl mu/m. This switch has low pull-in voltage of 15 V and fast switching speed of 60 /spl mu/s. An RF performance with >-50 dB isolation below 5 GHz and <-0.18 dB up to 30 GHz was observed.