Permalloy loaded transmission line for high-speed interconnects

In this work, we demonstrate: (1) permalloy can be incorporated with planar transmission lines using CMOS compatible process. Patterning the permalloy structures can extend its application well into the microwave frequency range, (2) the transmission line characteristics do not change under up to 50 mA current excitations, (3) the patterned permalloy reduces the magnetic coupling between two adjacent transmission lines by approximately 10 dB. The demonstrated operation frequency range, current drivability and magnetic field shielding property show that the lines can be used for high-speed interconnect applications in CMOS technologies.