Intra-chip optical interconnects with compact and low-loss light distribution in silicon-on-insulator rib waveguides

We report in this paper experimental and theoretical results showing that sub-micrometric rib (partially-etched) waveguides on silicon-on insulator (SOI) substrates can be used to achieve a low-loss and compact light distribution for on-chip interconnects in spite of the relatively low light confinement of this kind or waveguides. If compared with on-chip light distribution using SOI strip waveguides (fully-etched), this solution presents advantages such as minimal losses and minimal crosstalk between overlapping perpendicular waveguides.