The influence of electrodes on the reliability to PZT thin film

The effect of the Pt electrode and the Pt-IrO/sub 2/ hybrid electrode on the performance of ferroelectric device was investigated. The modified Pt thin films with non-columnar structure significantly reduced the oxidation of TiN diffusion barrier layer, which rendered it possible to incorporate the simple stacked structure of Pt/TiN/poly-Si plug. When a Pt-IrO/sub 2/ hybrid electrode is applied, PZT thin film properties are influenced by the thickness and the partial coverage of the electrode layers. The optimized Pt-IrO/sub 2/ hybrid electrode significantly enhanced the fatigue properties with minimal leakage current.