Full-wave analysis and electromechanical characterization of tunable capacitors

The paper presents the electromagnetic and electromechanical analysis of micro-machined tunable capacitors, suitable for integration in tunable antennas, reconfigurable filters and voltage controlled oscillators. The coupled electromechanical simulation is performed in order to calculate the behavior of the capacitors as function of the material properties and the applied voltage. The generalized transverse resonance-diffraction (GTRD) approach is used to obtain the frequency-domain electromagnetic response. Results are shown to be in good agreement with reported experimental values.