Design considerations and realization of a novel micromechanical bi-stable switch

A new concept for a micro mechanical bi-stable switch is presented. The bi-stability is achieved by a mechanically pre-stressed toggle-lever. Using FEM (ANSYS) the design of the switch has been optimised for symmetrical switching behaviour, large stroke and low mechanical stress throughout the structure. An analytical model of the bi-stable switch has been developed which gives similar results as the FEM calculations. With a stroke of about 100 /spl mu/m the switch can be utilized for fibre switching.