In-channel micromechanical plate interacting with fluid flow

We have studied the interaction of fluid with a suspended micromechanical plate encapsulated in a fluidic channel. Fluid flowed into the channel at a flow rate of 4.2 microliters/minute and the deformation of the plate observed using optical deflection means. The flow was modeled as Hagen-Poiseuille flow and the forces on the plate were calculated from the steady state solution for incompressible and isothermal flow in a square duct. FEM simulations of the plate predict an angular deflection of 2/spl times/10/sup -5/ radians while the observed deflection of the plate was 2.3/spl times/10/sup -4/ radians.