Three-dimensional nanostructure fabrication by focused-Ion-beam chemical vapor deposition

Three-dimensional nanostructure fabrication has been demonstrated by 30 keV Ga/sup +/ focused ion beam (FIB) assisted deposition using a hydrocarbon precursor (phenanthrene). Producing of three-dimensional nanostructure is discussed. Micro-coil and bellows with 0.1 /spl mu/m dimension were fabricated as parts of micro-system. Furthermore, microstructure plastic arts is advocated as a new field using micro-beam technology, presenting one example of micro-wine-glass with 2.75 /spl mu/m external diameter and 12 /spl mu/m height.