Micro combustion-thermionic power generation: feasibility, design and initial results

This paper reports for the first time the design, development and initial results from a micro power generator based on thermionic (TI) emission using combustion. Several major results are achieved. Thin-films of BaO are integrated with Si to form the emitter and collector of a TI converter. Field emission and TI emission currents are successfully measured from this converter. Thick SiO/sub 2/ rings are formed to achieve excellent thermal isolation. An integrated process to fabricate micromachined TI power generators is developed. Combustion has been achieved in the micromachined combustor. And power generation of /spl sim/1 /spl mu/W has been measured in emitter-collector subsystem testing. Improvement of the device and testing is needed for achieving system-level power generation from combustion.