Wafer level integration of a 24 GHz and 34 GHz differential SiGe-MMIC oscillator with a loop antenna on a BCB membrane

The wafer level integration of a 24 GHz and 34 GHz SiGe-MMIC oscillator with buffer amplifier and a loop antenna on a BCB (Benzo Cyclo Butene) membrane is demonstrated. The phase noise of the non-integrated 24 GHz and 34 GHz oscillator is -104 dBc/Hz and -88 dBc/Hz at an offset frequency of 1 MHz and the output power was measured to be +1 dBm and -3 dBm, respectively. The radiated power of both integrated systems is determined based on measurements with a horn antenna and discussed.