High resolution electrical characterization of laterally overgrown epitaxial InP

Dopant incorporation in epitaxial lateral over-growth of InP is investigated by scanning capacitance microscopy (SCM) and scanning spreading resistance microscopy (SSRM). Dramatic variations in doping contrast in the laterally overgrown regions are observed both in SCM and SSRM measurements implying highly inhomogeneous dopant incorporation. The observed doping variations are explained by surface bonding configurations in the different emerging planes during growth. The results show that methods such as SCM and SSRM not only provide detailed electrical information on a nanometer scale, but also give insights into the growth mechanisms.