Composite microbolometers with tellurium detector elements

A composite microbolometer has been constructed for possible use as a broadband submillimeter radiation detector. Theory, fabrication, and measurement of these devices are discussed, and a finite element thermal model is introduced. The devices utilize nichrome load elements which can be impedance-matched to a planar antenna. The load elements are thermally coupled to tellurium detectors. Room temperature responsivities of 120 V/W and noise equivalent powers (NEPs) as low as 6.7*10/sup -9/ W/ square root Hz were achieved. Performance appears to be limited by 1/f noise in the Te detector.<
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