Process qualification strategy for advanced embedded non-volatile memory technology - the Philips 0.18 /spl mu/m embedded flash case

A qualification strategy for advanced embedded non-volatile memory technology has been revealed. This strategy consists of: a thorough understanding of the requirements, extensive use and frequent update of the FMEA (failure mode effect analysis), a qualification plan with excellent coverage of all the risk areas, implementing effective in-line and off-line measures and control, and check-off of all the tests with good results. With such a strategy in place, the Philips 0.18 /spl mu/m embedded flash technology has been successfully qualified for volume production.