Effect of Al/sub 2/O/sub 3/ ALD nanocoatings on the thermo-mechanical behavior of Au/Si MEMS structures

In the present study we examine the effect of different thermal hold temperatures on creep and stress relaxation during the first thermal cycle and the effect of maximum cycling temperature on thermal ratcheting. We also explore the use of Atomic Layer Deposition (ALD) Al/sub 2/O/sub 3/ nanocoatings for the potential suppression of creep and thermal ratcheting. High-resolution Scanning Electron Microscopy (SEM) is employed to examine surface microstructural changes induced by thermal holding or cycling with and without ALD nanocoatings.