Cascade thermoelectric micro modules for spot cooling high power electronic components

The paper represents last achievements in developing short-legged multi-stage thermoelectric coolers (TECs) for spot cooling high power extremely localized electronic and electro-optic elements. Theoretical estimations and experimental study are undertaken to prove the feasibility and high attainable performance of such TECs. Novel multi-stage micro modules with TE legs length down to 0.2 mm having enhanced cooling capacity and increased temperature differences are developed on AlN substrates.