A new higher-pressure sensor measured by heat transfer with two heaters

This paper presents a newly developed pressure sensor. The principle of its pressure measurement is based on heat transfer from a heat source fabricated on a sensor element to a metal diaphragm, to which pressure is applied. The lower linearity errors less than /spl plusmn/1.0%FS without any compensation and the lower consumption power, 10 mW, are achieved by using a reference heater and an optimization of the sensor element.