Fabrication of 3-dimensional structure MOSFET embodied in the convex corner of the silicon microfluidic channel

The purpose of this work is to develop a new 3-dimensional structure MOSFET embodied in the convex corner of the silicon microfluidic channel (/spl mu/channel). In this paper, we will present the fabrication process and the electrical characteristics of the 3-dimensional structure MOSFET which will be useful for biochemical detection.