Excimer laser ablation based microlens fabrication in polymer materials

We demonstrate that excimer laser ablation can be applied successfully to fabricate microlenses and arrays of microlenses in an easy set-up allowing great flexibility in terms of size, shape and focal length of the lenses. Due to the non-contact and direct-write nature of the process, the technique allows easy insertion of micro-optics in a late phase of a heterogeneous optoelectronic assembly.