An Experimental Verification of a Simple Distributed Model of MIM Capacitors for MMIC Applications

A distributed model has been derived for MIM capacitors using a simple coupled-transmission-line approach. The model has been compared with measured S-parameter data from MIM capacitors having different aspect ratios fabricated on 4-mil GaAs substrates. The agreement is very good. The derived model will converge to the first-order capacitor model, generally given in the literature, under a few assumptions.