Static Capacitance Calculations for a Surface Acoustic Wave Interdigital Transducer in Multilayered Media

The static capacitance of an interdigital structure in multi-Iayered media has been calculated. Numerical results are given for a surface acoustic wave interdigital transducer on an oxidized silicon substrate with a piezoelectric overlay. The capacitance is derived in terms of the layer thicknesses for zero and infinite substrate resistivity.