In-Field Motionless Identification of the Non-Orthogonality of MEMS Gyroscopes

This paper introduces a novel, model-based method for determining the non-orthogonality of MEMS gyroscopes in-field without requiring any motion or complex optimization. The presented approach utilizes axis-separated electrostatic excitation via quadrature electrodes and a coupled transfer function model, enabling accurate in-field identification. Experimental results from 12 MEMS gyroscope research devices demonstrate a high degree of accuracy, with a mean residual of only 0.011% and a one-sigma deviation of 0.034% in comparison to measurements on a high-precision rate table. This motionless method offers a significant advancement, paving the way for improved in-field calibration and enhanced non-orthogonality performance of MEMS gyroscopes. [2025-0133]