Shear Horizontal Surface Acoustic Wave Resonators for 6G Centimeter Bands

This work designs and fabricates high-frequency shear horizontal surface acoustic wave resonators (SH-SAWRs) based on the X-cut lithium niobate on an insulator (LNOI) substrate for 6G centimeter bands. The study leverages finite element analysis (FEA) to systematically optimize key parameters, including interdigital transducer (IDT) pitch, electrode material, and thickness. The goal is to achieve a high resonant frequency and a significant effective electromechanical coupling coefficient simultaneously, making these resonators suitable candidates for next-generation wideband filters.