Thin Film AlScN Solidly Mounted Lamé Mode Resonator with High Electromechanical Coupling

This paper presents the simulation and experimental results of a solidly mounted Lamé mode resonator based on AlScN piezoelectric thin films. The devices were fabricated in two configurations: with the AlScN film deposited on a Mo/SiO2/Si substrate and on a multilayered acoustic Bragg mirror. The resonators demonstrated outstanding performance, achieving an electromechanical coupling coefficient of 14.3% and a quality factor of 1110 at 1718 MHz. The highest experimental coupling coefficient reached 18%.