Spurious-free new plate wave resonator with bandwidth of 18% using X-113°Y-LiNbO3

Wideband resonators are demanded due to the increased global mobile network data traffic. In this work, we introduce a new plate wave resonator, which shows different displacement and electric fields compared to previously reported works. The structure is composed of a X-113°Y LN thin film sandwiched between top interdigital transducer (IDT) and bottom electrode. A large BW of 18% and high impedance ratio (Z-ratio) of 60 dB without spurious mode are successfully realized at 2GHz.