Precision Engineering of SiO2/Air Periodic Nanocavity Wafers for Integrated Optoelectronic Systems

The rapid advancement of 5G/6G and automotive radar technologies demands highly compact, thermally stable, and high-performance RF front-end components. Traditional acoustic filters often face challenges such as thermal hotspots, limited power handling, and tradeoffs between quality (Q) factors and insertion loss. To address these issues, this study presents a novel approach to precision engineering of periodic SiO₂/air nanocavity wafers for integrated optoelectronic systems. By leveraging the unique properties of alternating SiO₂ and air grooves beneath electrodes, we achieve superior thermal management, acoustic energy confinement, and mechanical durability, paving the way for next-generation RF solutions.