Extreme-Environment Sensor Systems for Industrial Applications

There is a pressing need for sensors and associated monitoring systems that can operate in industrial high-temperature (HT) harsh environments (HE) well above the 200°C limit of traditional silicon (Si) microelectronics. This invited paper discusses recent advances regarding microwave acoustic sensor systems capable of delivering temperature and strain monitoring in HT HE conditions, as well as neutron flux monitoring under intense irradiation and at high temperatures. In addition, HT HE SiC and GaN based oscillators, along with thermoelectric generators (TEGs) for powering these systems, and their integration with acoustic wave and capacitive sensors at HT are presented and discussed. The reported technological advances broaden the spectrum of sensors and circuits relevant to high-temperature harsh-environment industrial applications.