CMUT surface temperature profiling in resonance and non-resonance mode using a micro-fractal patterned resistance temperature detectors(μ-FRTD)

Current ultrasound-based tumor therapies are constrained by transducer-induced heating and complex experimental setups requiring separate devices for treatment and imaging. In this work, we introduce a capacitive micromachined ultrasonic transducer (CMUT) integrated with a micro-fractal resistance temperature detector (µ-FRTD) to quantitatively evaluate vibrational and thermal behaviors under resonance and non-resonance modes. The fabricated device exhibited uniform nanoscale fractal patterns and enabled simultaneous measurements of plate displacement and surface temperature. Distinct electrical impedance responses were demonstrated at resonance frequency (f0). In particular, resonance mode of the CMUT, surface temperature variations of up to 0.75 K were measured. These results provide quantitative heat values for CMUT operation and demonstrate the feasibility of a single transducer platform for combined therapeutic and imaging applications.