A Novel Ultrahigh-Resolution MEMS Microdefect Detection System Leveraging Lorentz Force

A novel micro electromechanical system (MEMS) device based on Lorentz force particle analyzer (LFPA) was developed to detect micro-defects in metal foils. The device comprises MEMS microforce sensors, a capacitive readout circuit, and signal-processing enhancement algorithms. To improve the stability and sensitivity of the sensor, a multiobjective optimization of the sensor’s structural parameters was carried out using a genetic algorithm. In addition, a signal-compensation algorithm based on hardware–software collaboration was proposed to extract signals where the signal-to-noise ratio (SNR) is less than 1. Experimental results show that the device has a sensitivity of 170 fF/ $\mu $ N, a resolution of 25 nN, and can detect defects as small as $20~\mu $ m in diameter. These results demonstrate the potential application of this device in the nondestructive testing (NDT) of metal foils’ production.