High-Performance Piezoresistive Pressure Sensor Based on MEMS Technology

Piezoresistive pressure sensors based on MEMS technology are widely used in various applications. However, when it comes to practical applications, a major limitation of these sensors is their sensitivity to temperature variations, which causes significant temperature drift and impacts their measurement accuracy and reliability. To address this issue, this paper proposes a novel approach to mitigate the temperature drift of piezoresistive pressure sensors. This is achieved by integrating a temperature sensor directly onto the sensor chip, coupled with software-based compensation algorithms. The integrated system effectively compensates for temperature-induced variations in the piezoresistive material, resulting in a more stable and accurate pressure measurement. The designed sensor chip can be fabricated using standard MEMS processes, ensuring minimal impact on production complexity and cost. This solution provides a practical and scalable method to enhance the performance of MEMS-based piezoresistive pressure sensors, making it highly suitable for applications that demand high temperature stability and precision.