An Enhanced TRL Calibration Method for On-Wafer Leaky Systems Using a 10-Term Error Model

An enhanced thru-reflect-line (TRL) calibration method based on a 10-term error model is presented to address probe-to-probe crosstalk in on-wafer measurements. Unlike the conventional 12-term error model, the proposed model accounts for signal leakage between probes and can be solved using the same TRL calibration standards through an iterative process. Detailed theory for determining the error terms is presented. The method is validated through the simulation of probing a 3-dB attenuator, demonstrating significantly improved performance over both the eight-term and 12-term TRL calibration methods. These results highlight the advantages of the proposed method in terms of both simplicity and accuracy.