A MEMS-Based On-Chip Scanning System for Compact Spectral Imaging: Design, Fabrication and Performance Evaluation

Spectral imaging technology combines spectral detection and imaging technology, and there is an urgent need for it in scenarios such as environmental monitoring and OCT. However, traditional spectrometers have problems such as low data acquisition efficiency, slow detection speed, strict requirements for instrument operation and alignment, large volume, and difficulty in on-chip system design. This paper presents a high-resolution MEMS Fourier transform infrared spectrometer system. The 45° tilted micromirror structure is used to achieve horizontal/vertical separation of the incident light beam, reducing light loss. It is highly integrated with the in-plane electrostatic comb drive, reducing the overall chip size. The optical path delay system increases the optical path difference to improve the resolution. The finite element simulation results show that the designed driving device has a response time of 4.3 ms, a scanning frame rate of 116.3 Hz, and a minimum modal frequency of 1353.31 Hz, indicating good mechanical stability. The optical simulation shows that high-contrast interference fringes can be generated, with the light intensity uniformity exceeding 50%, the optical path efficiency being 24.1%, the signal-to-noise ratio reaching up to 174.6 dB, and the spectral resolution reaching 2.29 cm⁻¹.This study provides a feasible solution for the development of high-performance and miniaturized spectrometers, and lays a foundation for the research and development of high-resolution miniature spectral detection devices.