3.54-Million Q-Factor Micro Hemispherical Resonator Gyroscope with Segmented Displacement Startup

The micro hemispherical resonant gyroscope (MHRG) combines the advantages of MEMS gyroscopes and hemisphere resonant gyroscopes, making it widely used in high-precision navigation and control fields. However, due to its high quality factor (Q) and low-frequency splitting characteristics, the control system exhibits narrow bandwidth, which leads to significant energy coupling during the startup phase, making high-precision closed-loop control prone to failure. To address this, this paper proposes a segmented displacement startup approach, where different reference levels are set to reduce feedthrough energy and achieve rapid energy suppression within each segment, enabling stable startup with small PI control parameters. Experimental results show that the bias instability is $0.047^{\circ} / \mathrm{h}$, which is a 72 % improvement compared to the straight startup approach.