A MEMS Piezoresistive 3D Force Sensor for Robotic Dexterous Hands

Tactile sensors for robot have received widespread attention from researchers. However, current robot tactile sensors are mainly based on flexible materials, which have large volume, poor consistency, and poor stability. This paper proposes a micro-electro-mechanical system (MEMS) piezoresistive three-dimensional (3D) force sensor for robot tactile perception based on a rigid-flexible coupling structure. The sensor, which is composed of a MEMS force sensing chip featuring four cantilevers, an encapsulated shell, and an elastic force transmission layer, is fabricated through a series of MEMS processes. When the robotic fingertip is subjected to a force, the resistances of piezoresistors on the micro-cantilevers will be changed, transforming the tactile force into electrical signals. The proposed sensor exhibits linear response to 3D forces, possess fast response capability (~ 30 ms). This sensor has great potential for applications in robot tactile perception and human-machine interaction.