A High-Mass MEMS Gyroscope with Enhanced Large Capacitance and Area-Variable Comb Electrodes

This paper presents the design and characterization of a high-sensitivity, large-capacitance eight-mass gyroscope (EMG). The EMG features an equivalent mass of 1.92 mg and a detection capacitance of 3.9 pF. The device was fabricated using a silicon-based process and electrostatic tuning was applied. Experimental results in force re-balance (FRB) mode show a bias instability of 0.27°/h and an angle random walk (ARW) of $0.07^{\circ}/\sqrt{} \mathrm{h}$. These findings demonstrate the performance improvements achieved by the high mass and large capacitance, which contribute to an improved signal-to-noise ratio and stability compared to previous designs.