A Novel Structure of MEMS Alkali Vapor Cell with Intermediate Glass Layer for Atomic Sensors

Atomic sensors, including atomic inertial sensors, atomic magnetometers, and atomic clocks, rely on alkali vapor cells as their core sensitive components. The characteristics and quality of these vapor cells directly determine the precision and capabilities of the sensors. By optimizing the structure and materials of alkali vapor cells, the sensitivity, stability and reliability of atomic sensors can be enhanced. In this paper, a novel structure is proposed, which is suitable for atomic inertial sensors. We demonstrate the microfabrication process and conduct simulation analysis of the polarization distribution of alkali atoms and noble gas nuclei, validating the feasibility of the design.