Research on the Suppression Method of Charge Accumulation Effect in Micro-Hemisphere Gyroscope Based on Polarization Voltage Modulation

With the advantages of high precision, low cost, and compact size, micro-hemisphere gyroscopes have emerged as a highly demanded product for high-end industrial applications. However, as their precision improves, the impact of charge accumulation on long-term stability has become increasingly prominent, which especially affect the reliability of high-precision device [1]. To address this challenge, this study proposes a polarization voltage modulation-based method to suppress internal charge accumulation. Experimental results demonstrate that under a polarization voltage with a symmetric positive-to-negative voltage ratio of 1:1, the micro-hemisphere gyroscope exhibits a frequency split of 0.04 mHz after 600 minutes of continuous operation, representing a 90 % reduction compared to the 0.64 mHz drift observed under DC bias conditions. This approach significantly enhances the frequency difference stability during prolonged operation and validates the critical role of polarization voltage symmetry in mitigating charge-induced performance degradation, thereby advancing the reliability of MEMS-based inertial sensors.