Design of a Piezoelectric Ceramic Parallel-Driven Macro-Micro Composite Platform and Hysteresis Modeling

With the rapid development of micro/nano-positioning technology, traditional positioning platforms struggle to meet the demands for high precision and multi-dimensional positioning. As a novel precision positioning device, macro-micro composite platforms integrate macro-and micro-scale motion capabilities, enabling high-precision, cross-scale positioning, which offer significant application value. This paper presents a parallel piezoelectric-driven macro-micro platform, which employs the stick-slip driving principle to achieve three-dimensional micro-positioning using the bidirectional motion of three multilayer piezoelectric ceramic stacks. The platform boasts advantages such as high precision, wide operational bandwidth, and compact footprint, ensuring stable and accurate motion. However, the inherent hysteresis nonlinearity of piezoelectric ceramic actuators severely impacts positioning accuracy and repeatability. To mitigate this limitation, this paper proposes a hysteresis-linear series structure model and its inverse compensation control method. Based on Preisach theory, an asymmetric hysteresis model is developed through discretization of the Preisach plane, while neural network approximation is incorporated to simplify the modeling procedure. Next, a dynamic linear model is combined with the neural network-based hysteresis model to form a series structure, and MATLAB's System Identification Toolbox is used to optimize linear parameters, significantly reducing modeling errors. Finally, an inverse model of the series structure is constructed, enabling precise piezoelectric actuator positioning through inverse compensation open-loop control. This research provides theoretical support and technical references for the precise control of piezoelectric actuators, offering new insights for the design and optimization of micro/nano-positioning platforms, exhibiting substantial academic value and engineering application prospects.