Comparison of Broadband Single-Sweep and Conventional Banded System On-Wafer S-Parameter Measurements up to 220 GHz

This paper presents a comparison of on-wafer $S$-parameter measurements of coplanar waveguide (CPW) devices using broadband single-sweep and conventional banded systems, up to 220 GHz. Three attenuators and a pair of loads on a commercial calibration substrate were measured using these two different types of systems in the same laboratory, and the results are reported and discussed. Overall, good agreement was observed between the two different approaches. This study benchmarks the performance of the single-sweep system against conventional banded systems using on-wafer measurements and provides insights into the equivalence of these methods for other users.