Design of Miniaturized Wideband TSV Tunable Inductor Based on Magnetic Coupling Effect

A TSV-based nested tunable inductor is proposed, where the primary inductor is nested within the auxiliary inductor. Both the geometrical and the equivalent circuit models of the tunable inductor are established, and the simulation error between them is less than 2.2%. Based on the magnetic coupling effect, the inductance can be tuned within the range of 1.17-3.79 nH (self-inductance is 1.62 nH), achieving a tuning ratio of 69.1%. The area of the inductor is only 90 μm × 150 μm.