Fabrication and Testing of the Projection Lens for Miniaturized Transmission Electron Microscope

In this paper, the first results of developing miniature transmission electron microscope is presented. Following previously presented results on the miniaturization of SEM using MEMS technology, an experimental setup was set to determine the parameters of a projection lens made from a single silicon electrode. Additionally, numerical simulations of three arrangements of electrodes were made to calculate the magnification achieved in such a microcolumn and to compare the influence of the geometry of the microcolumn on the results.