A Method for Automatic Alignment in Electron Beam Measure and Analysis Systems

A method for automatic alignment is proposed in the electron beam measure and analysis system. It aims to resolve the alignment issue between the emission center of the electron gun and the Faraday cup. The method is as follows: when the laser rangefinder is positioned at the small aperture of the Faraday cup, variations in the measured height are observed. By utilizing a moving platform to perform cross-sectional scanning, a region with significantly lower height compared to surrounding areas can be identified within a certain range. The center of the Faraday cup is determined based on the symmetry of this region. Through iterative narrowing of the scanning range, a symmetrical matrix is generated, with its center converging to the emission center of the electron gun.