A Highly Sensitive CMOS-MEMS Integrated SOC for Flow and Temperature Sensing Using a Microcantilever Array

For the first time, we present a CMOS-MEMS System-on-Chip (SoC) for dual-mode temperature and flow sensing, achieved through the monolithic integration of a capacitive microcantilever array with an on-chip digital signal processing circuit. Fabricated using a 0.18 μm 1P6M CMOS process and an in-house developed post-CMOS technique, the SoC exhibits exceptional dual-mode sensing performance. In temperature sensing mode, the SoC achieves a sensitivity of 25.5 kHz/°C with a nonlinearity of <1 % Full Scale Span (FSS) over a range of 20~ 100°C. In flow sensing mode, the SoC attains a maximum sensitivity of 32.75 kHz/(m/s) for gas flow velocities up to 130 m/s, with a standard deviation of <1.3°/ across five repeated measurements. These results highlight the ultra-sensitive detection capabilities of the microcantilever array-based SoC, while its compact, integrated design shows strong potential for advanced sensing applications.