Highly Robust and Mechanically Stable Gas Sensor Through Symmetrical Fixed-Guided L-Shaped Beams

This paper presents a novel symmetrical fixed-guided structure incorporating L-shaped beams, specifically developed to improve mechanical stability and electrical durability of semiconductor metal oxide gas sensors. By utilizing this structural approach, we successfully fabricated a carbon monoxide sensor with minimal deformation even after air-suspension. Experimental evaluation revealed exceptional electrical reliability, maintained stable performance beyond 30,000 operational cycles and exhibited a projected lifetime of approximately 50 years at operating temperature of 200°C. This work significantly advances sensor robustness, enabling not only long-term reliable gas detection.