Near Zero-Power Omnidirectional, In-Plane Pull-In-Based MEMS Switch

This work presents a novel, in-plane, near zero-power omnidirectional MEMS switch device based on the nonlinear pull-in effect. The proposed design features a suspended movable mass anchored by six planar spiral springs, ensuring uniform stiffness in all in-plane directions. The inertial contact threshold is tuned by omnidirectional parallel-plate electrostatic actuators. Experimental results validate the device's tunability in multiple directions, with thresholds ranging from 400 mg to 5.25 g for an actuation voltage range between 14 V and 5 V, respectively. These results demonstrate the device's potential for reliable and versatile, near-zero power, multi-threshold acceleration detection.