A Closed Loop Near-Zero Stiffness Mems Accelerometer Based on Electrothermal Buckling

This study proposes, for the first time, a closed loop near-zero stiffness micro-electro-mechanical system (MEMS) accelerometer based on electrothermal microbeam buckling. A system-level model was developed to optimize the parameters of proportional-integral-derivative (PID) control. Experimental results demonstrate that closed loop control significantly improves linearity by 41.27% and increases the resonant frequency by 127%. This closed loop control method can be widely applied to various near-zero stiffness MEMS accelerometers, including mechanical anti-spring designs.